GLOBAL SEMICONDUCTOR EQUIPMENT SERVICES
Semiconductor EquipmentParts, Service & Retrofit
From Kumamoto to Asia — parts supply, repair and upgrade for CMP, etch, CVD, implant and vacuum, backed by production bases in Dalian, Korea, Malaysia and Singapore.
- Head OfficeKumamoto
- Kumamoto FactoryAso (opening soon)
- Production BasesDalian · Korea · Malaysia · Singapore
- Business BaseHsinchu, Taiwan
- Parent CompanyWUER TECH (Singapore)
Processes
CMP · ETCH · CVD · ImplantMajor OEMs
AMAT · EBARA · LAM · SMITGlobal network
6 countries & regions in AsiaLocal response
Kumamoto City & AsoCOMPANY OVERVIEW
A Kumamoto-Based Partner for Semiconductor Equipment
29TECH supplies parts and delivers maintenance, repair and retrofit services for semiconductor manufacturing equipment — combining local response in Kumamoto with production bases across Asia.
| Item | Details |
|---|---|
| Company | NIKU TECH CO., LTD. (29TECH) |
| Established | September 2025 |
| Capital | JPY 5.06 million |
| Corporate Number | 4330001033565 |
| Head Office | Aruba Ginza-dori Bldg., 4-22 Chuogai, Chuo-ku, Kumamoto-shi, Kumamoto 860-0802, Japan |
| Kumamoto Factory | 1537-1 Matoishi, Aso-shi, Kumamoto, Japan (opening soon) |
| Production Bases | Dalian · Korea · Malaysia · Singapore |
| Business Base | Hsinchu, Taiwan |
| Parent Company | WUER TECH (Singapore) |
| Business | Parts supply, maintenance, repair and retrofit of semiconductor equipment; precision parts machining; trading |
Engineering experience at leading fabs
- Processes
- CMP · ETCH · CVD · Implant
- Major OEMs
- AMAT · EBARA · LAM · SMIT
- Local response
- Kumamoto City & Aso
BUSINESS DOMAINS
Six Service Lines, One Partner
CMP Repair & Overhaul
Polishing heads, drive motors, PC gears and robots — AMAT Reflexion LK / Mirra, EBARA F-REX300X / 300S2.
Learn more →02Retrofit & Smart Upgrades
Leak, flow and temperature monitoring, self-clean systems, custom slurry delivery and tool relocation.
Learn more →03ESC & Heater Solutions
300 mm electrostatic chucks for LAM etch, ion implant and HDPCVD — new 2nd-source and refurbished.
Learn more →04Precision Seals & O-rings
FFKM / FKM seals reverse-engineered to OEM part numbers for CMP, etch and CVD chambers.
Learn more →05Vacuum & Utility Service
Dry-pump and turbo-pump overhaul, pendulum and vacuum valve repair, process chillers.
Learn more →06Consumables & Precision Parts
Si / SiC rings, metal parts, implant W / Mo / graphite, custom metal, plastic and ceramic machining.
Learn more →GLOBAL NETWORK
Kumamoto Hub, Asian Production Network
Local support in Japan, scalable production across Asia — one partner for global semiconductor supply chains.
Schematic map — not to scale
HEAD OFFICE
Kumamoto, Japan
Aruba Ginza-dori Bldg., 4-22 Chuogai, Chuo-ku, Kumamoto-shi, Kumamoto 860-0802, Japan
Sales, engineering and customer window
KUMAMOTO FACTORY
Aso, Kumamoto
1537-1 Matoishi, Aso-shi, Kumamoto, Japan (opening soon)
Repair, rework and parts machining — close to Kumamoto fabs
PRODUCTION BASES
Dalian · Korea · Malaysia · Singapore
Integrated production: machining, refurbishment, assembly and inspection
BUSINESS BASE
Hsinchu, Taiwan
Sales and customer support in Taiwan
PARENT COMPANY
WUER TECH
Singapore
Global sourcing of key parts and materials
Customers in Japan are served locally from Kumamoto — volume production scales across our bases in Dalian, Korea, Malaysia and Singapore, with sales and support from Hsinchu, Taiwan.
KUMAMOTO FACTORY — OPENING SOON
Opening Our Own Factory in Aso, Kumamoto
1537-1 Matoishi, Aso-shi, Kumamoto, Japan
Planned functions
- Repair & reworkCMP, etch and CVD parts — teardown, overhaul and bench test
- Machining, assembly & inspectionPrecision parts finished and verified in Kumamoto
- Fast local supportTogether with our Kumamoto City head office
CMP SERVICE
CMP Service Scope
Repair capacity for CMP drive motors, polishing-carrier gears and modules — the most frequent maintenance needs.
| Equipment | Module / Part | Service |
|---|---|---|
| AMAT Reflexion LK | Platen / carrier-head / conditioner drive motors | Repair / rewind / test |
| EBARA F-REX300X | Top-ring / turntable / dresser drive motors | Repair / rewind / test |
| EBARA F-REX300S II | Top-ring / turntable / dresser drive motors | Repair / rewind / test |
| AMAT & EBARA | PC (polishing-carrier) gear / drive-train | Repair / replacement |
| EBARA CMP | DDF3 module | Overhaul / repair |
Scope is expandable to other CMP modules and process tools on request.
Priority items
Drive / spindle motors · PC gears · DDF3
AMAT Reflexion LK
Platen, carrier-head and conditioner drive motors
EBARA F-REX300X / 300S2
Top-ring, turntable and dresser motor families
PC gear & DDF3
Drive-train repair / replacement and DDF3 overhaul
IN-HOUSE CAPABILITIES
Repair & Machining Under One Roof
Core capabilities
- CMP / CVD / ETCH parts repairTeardown, parts replacement and bench-test overhaul
- Motors · flow · power suppliesRebuild of drive motors, flow controllers and PSUs
- Non-standard machiningMetal, plastic and ceramic parts to drawing
- Equipment modificationRetrofit and upgrade of existing tools
Test & rework stations
Pump analysis station · PCB-level rework · functional test system — every repaired unit is verified before delivery.
Proven CMP Repair & Overhaul
CASE STUDY
Polishing-Head Gear Assembly Overhaul
Representative overhaul flow for AMAT LK / Reflexion-class polishing-head gear assemblies.
1Inspection & fault check
2Disassembly & cleaning
3Parts replacement
4Function & load test
5Pad break-in & QC
Parts replaced
Harmonic drive · sweep bearing · sweep / rotation motor · oil seals
Validated
Sweep & rotation current / torque · home-sensor count · pad break-in trend
Repair Validation & Test Capability
Test items
- Function & load test
- Home-sensor count test
- Pressure / leak test
- Pad break-in simulation
Every repaired unit is verified on dedicated test benches before delivery.
CMP CORE PARTS
Refurbishment of CMP Core Parts
- Parts supply · refurbishment · repairHead, spindle, robot, drives, rotary joint, gear box
- Tool serviceInstallation · refurbishment · repair · PM · modification
RETROFIT · UPGRADE
CMP Tool Upgrades & Smart Solutions
- 1Pressure detection · data logging · auto-alarm (EBARA)
- 2DIW & chemical leakage detection (AMAT / EBARA)
- 3Chemical flow-rate monitoring · auto-alarm
- 4Exhaust auto-damper control
- 5Self-clean system (automatic tool cleaning)
- 6Temperature detection · auto-alarm (AMAT / EBARA)
- 7CCTV camera tool monitoring (AMAT / EBARA)
- 8Custom single slurry manifold
- 9Custom port-server power supply
- 10Head spindle cover · slurry box integration · UPA relocation
From mechanism design to slurry delivery — fully customized per customer and tool.
ETCH · IMPLANT · HDPCVD
Electrostatic Chuck (ESC) Solutions
300 mm ESC for etch, implant and HDPCVD
- OEM-compatible 2nd sourceDrop-in replacements for LAM etch, SMIT implant and AMAT HDPCVD platforms
- New units and refurbishmentReduce cost and lead time versus OEM
- Acceptance-testedClamping force, flatness, leak and insulation verified per unit
- CVD heaters also availableAMAT Producer-class heaters
- Technical supportSelection, installation and after-sales follow-up
ESC Part-Number Coverage (Selected)
| Process | OEM | Platform | Part No. | Size |
|---|---|---|---|---|
| ETCH | LAM | 2300 Kiyo | 839-019090-324 | 300mm |
| ETCH | LAM | 2300 Kiyo | 839-019090-328 | 300mm |
| ETCH | LAM | 2300 Kiyo 45 | 839-019090-374 | 300mm |
| ETCH | LAM | 2300 Kiyo EX | 839-019090-611 | 300mm |
| ETCH | LAM | 2300 Kiyo CX | 839-019090-608 | 300mm |
| ETCH | LAM | 2300 Kiyo FX | 839-019090-620 / -632 | 300mm |
| ETCH | LAM | 2300 Flex 45 | 839-800327-432 | 300mm |
| ETCH | LAM | 2300 Flex DX/DS | 839-800327-438 | 300mm |
| ETCH | LAM | 2300 Flex ES/EL | 839-019090-577 | 300mm |
| Process | OEM | Platform | Part No. | Size |
|---|---|---|---|---|
| ETCH | LAM | 2300 Flex GX/GXE | 839-800327-525 | 300mm |
| ETCH | LAM | 2300 Flex HX+ | 839-102001-136 | 300mm |
| ETCH | LAM | 2300 Syndion FS | 839-800327-304 | 300mm |
| ETCH | LAM | 2300 Versys Metal | 839-800327-315 | 300mm |
| IMP | SMIT | MC3-II / GP | 11F5793 | 300mm |
| IMP | SMIT | S-UHE | 11G8756 | 300mm |
| HDPCVD | AMAT | Ultima | 0040-48594 | 300mm |
| HDPCVD | AMAT | Ultima | 0040-18219 | 200mm |
Selected coverage — other part numbers available on request.
Etch · Implant · HDPCVD — new 2nd-source and refurbished units, 12-month warranty, lead time 20–60 days.
ESC Acceptance Criteria
| Test item | Specification |
|---|---|
| Clamping force | ≥ 2,000 gf/cm² @ 2,000 VDC |
| Surface flatness | ≤ 10 μm |
| Leak rate | ≤ 0.5 mTorr·L/s |
| Insulation resistance (inter-electrode) | ≥ 20 GΩ·cm |
| Insulation resistance (electrode–base) | ≥ 20 GΩ·cm |
| Static capacitance | ≥ 3 nF (±0.5) |
CVD heaters
AMAT Producer GT: 0010-59798 · 0010-59788
AMAT Producer: 0010-53901 (300 mm)
An acceptance report accompanies every unit shipped.
PARTS SUPPLY
Precision Seals & O-Rings
High-performance fluoroelastomer O-rings and seals for CMP, etch and CVD chambers, reverse-engineered to OEM part numbers.
| OEM Part No. | Description | Size (mm) |
|---|---|---|
| 734-061280-014 | O-ring AS014 | 12.42 × 1.78 |
| 734-007524-284 | O-ring AS284 | 456.06 × 3.53 |
| 734-046356-329 | O-ring AS329 | 50.17 × 5.33 |
| 734-046356-226 | O-ring P50 | 49.70 × 3.50 |
| 734-021063-238 | O-ring AS238 | 88.49 × 3.53 |
| 734-021063-277 | O-ring AS277 | 291.69 × 3.53 |
| 3700-06977 | O-ring AS130 | 40.94 × 2.62 |
Representative coverage. Supplied with material and dimensional inspection report.
Materials & grades
Highlights
- Reverse-engineered to OEM part numbers
- Plasma- and chemical-resistant compounds
- Sizes from ø10 mm to ø450 mm+
- Custom compounds and sizes on request
- Lead time approx. 8 weeks
CONSUMABLES
Si & SiC Consumable Parts
| Type | OEM | Description | Part No. |
|---|---|---|---|
| Si | LAM | Polished OUE | 716-082039-233 |
| Si | LAM | Polished OUE | 716-082039-235 |
| Si | TEL | Ring, focus 380-T4.0 | 3D10-202489-61 |
| Si | TEL | Electrode, outer DC2 EXT | 2L10-501683-61 |
| SiC | LAM Kiyo | EX top ring 4.5T | 716-089795-124 |
| SiC | LAM Kiyo | Top ring 4.19T | 716-086795-123 |
| SiC | TEL MK4 | Focus ring 3.95T | 1D99-190810-11 |
- Si parts for etch & CVDShowerhead, Si ring, CSR; Si fusion boats, tubes, pedestals
- CVD SiC focus / edge ringsReverse engineering for most SiC parts
Metal, Ion-Implant & Graphite Parts
Implant tool coverage
- AMAT VIISta 900XP
- AMAT VIISta Trident / XP / XP2
- AMAT VIISta HC · MC · HE
- AMAT VIISta MEHD2
- Axcelis Purion H · XE · M
- Nissin Exceed 2000AH / 3000AH
Graphite W-001 — key properties
- Density
- 1.91 g/cm³
- Resistivity
- 12 μΩm
- Ash content
- 0.0005 %
- Thermal conductivity
- 105 W/mK
VACUUM · UTILITY
Vacuum Pump, Valve & Chiller Service
Dry pumps
Overhaul and supply for mainstream series — Edwards iH / iXH / iQL, Ebara ESA / ESR / EV, Alcatel A / ADS / ADP, Busch.
Turbo pumps & valves
STP turbo-pump repair, pendulum-valve overhaul and vacuum-valve repair with leak testing.
Chillers
Compressor chillers, heat exchangers and thermoelectric chillers; custom cooling solutions.
WET PROCESS · TEST
Wet-Process Parts & Test Hardware
Wet etch — spin base overhaul
- Disassembly & inspection
- Level, eccentricity, dynamic-balance and resistance checks
- Repair & SOP assembly
- Normal · high-temp SPM · backside-clean types
Visual management with operator sign-off — every step traceable to form and operator.
Test & reliability hardware
- Memory burn-in boards for HTOL / HAST reliability testing
- Load boards and probe cards
- EM socket DUT fabrication with in-house PCB cloning
QUALITY
Quality & Traceability, from Material to Shipment
- 1Material
- 2Machining
- 3Cleaning
- 4Assembly (SOP)
- 5Inspection
- 6Shipment check
SOP standardized work
Visual management and operator sign-off assure assembly quality.
Four key inspections
Level, eccentricity, dynamic balance and electrical resistance — 100% checked.
Full traceability
Centralized inspection records, traceable to form and operator.
Inspection reports accompany shipments — built to the requirements of leading global fabs.
WHY 29TECH
Why Partner with 29TECH
Local response in Kumamoto
Kumamoto head office and our own factory in Aso, close to major fabs.
Global production network
Machining, refurbishment, assembly and inspection across Japan and Asia.
Proven CMP know-how
Heads, motors, PC gears and robots — validated on test benches.
Broad parts coverage
ESC, seals, Si / SiC, metal, implant, vacuum and test hardware.
Reverse engineering
Re-engineer worn or long-lead parts to OEM part numbers.
Quality you can trace
SOP work, 100% inspection and reports with every unit.
CONTACT
Contact
From parts supply to repair and retrofit — contact us for CMP, ETCH, CVD, implant and vacuum.
HEAD OFFICE
Aruba Ginza-dori Bldg., 4-22 Chuogai, Chuo-ku,Kumamoto-shi, Kumamoto 860-0802, JapanView on Google Maps ↗
Production Bases: Dalian, Korea, Malaysia, Singapore | Business Base: Hsinchu (Taiwan) | Parent Company: WUER TECH (Singapore)